Micro Electro Mechanical System (MEMS) Seminar and PPT with pdf report: Micro electro mechanical systems are attractive for many applications because of their small size and weight, which allow systems to be miniaturized.

Also See: Induction Motor PPT

 MEMS PPT Presentation Seminar with PDF Report

 MEMS are small merged devices or systems that combine electrical and mechanical components.

 Application of MEMS

  • Weapons safing, arming, and fuzing.
  • Embedded sensors and actuators for condition-based maintenance.
  • Mass data storage devices for high density and low power.

Components

  •  Micro Electronics
  • Micro Sensors
  • Micro Actuators
  • Microstructures

 Manufacturing process of MEMS

  • MATERIALS
  • PHOTOLITHOGRAPHY

Also See: Smart Material PPT

Fabrication Process in MEMS

  • Advanced Micro Systems Fabrication Technologies
  • Plastics Technologies
  • Glass Technologies
  • Silicon Technologies
  • Metals Technologies
  • Precision Machining Technologies
  • Jet Deposition Technologies
  • Laser Sintering Technologies
  • Jet Molding Technologies
  • Electrical Discharge Machining
  • Micro milling / drilling
  • 3-D Micro Fabrication Technologies
  • Emerging Silicon Micro Fabrication Technologies
  • Deep Reactive Ion Etching
  • Electroplated Photo resist
  • Integration of Piezoelectric Devices

Also See: Smart Dust PPT

Advantages of MEMS

  • Ease of production.
  • MEMS can be mass-produced and are inexpensive to make.
  • Ease of parts alteration.
  • Higher reliability than their macro scale counterparts.

Content of the Seminar and pdf report for MEMS PPT

  • INTRODUCTION
  • WHAT ARE MEMS?
  • APPLICATION OF MEMS
  • COMPONENETS
  • MANUFACTURING PROCESS OF MEMS
  • SILICON MICROMACHINING
    BASIC TECHNIQUES
  • THIN FILMS
  • WET ETCHING
  • DRY ETCHING
  • EXCIMER LASER MICROMACHINING
  • FABRICATION PROCESS IN MEMS
  • WET ETCHING
  • DRY ETCHING
  • EXCIMER LASER MICROMACHINING
  • FABRICATION PROCESS IN MEMS
    • ADVANCED MICRO SYSTEM FABRICATION TECHNOLOGIES
    • PRECISION MACHINING TECHNOLOGIES
    • EMERING SILICON MICRO FABRICATION TECHNOLOGIES
  • ADVANTAGES
  • DISADVANTAGES
  • CONCLUSION
  • REFERENCES

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Sumit ThakurMechanicalMicro Electro Mechanical System (MEMS) Seminar and PPT with pdf report: Micro electro mechanical systems are attractive for many applications because of their small size and weight, which allow systems to be miniaturized.Also See: Induction Motor PPT  MEMS PPT Presentation Seminar with PDF Report  MEMS are small merged devices or systems...