Micro Electro Mechanical System (MEMS) Seminar and PPT with pdf report: Micro electro mechanical systems are attractive for many applications because of their small size and weight, which allow systems to be miniaturized.

Seminars are the integral part of engineering. At one point, we all have to make ppt of any topic and submit its report. And getting a right seminar for submission is really a tough task. We have given our full efforts to provide you exact ppt with pdf report for embedded systems seminar. This page contains MEMS Seminar and PPT with pdf report.

 MEMS Seminar PPT with pdf report

 MEMS are small merged devices or systems that combine electrical and mechanical components.

 Application of MEMS

  • Weapons safing, arming, and fuzing.
  • Embedded sensors and actuators for condition-based maintenance.
  • Mass data storage devices for high density and low power.

 Components

  •  Micro Electronics
  • Micro Sensors
  • Micro Actuators
  • Microstructures

 Manufacturing process of MEMS

  • MATERIALS
  • PHOTOLITHOGRAPHY

 Fabrication Process in MEMS

  • Advanced Micro Systems Fabrication Technologies
  • Plastics Technologies
  • Glass Technologies
  • Silicon Technologies
  • Metals Technologies
  • Precision Machining Technologies
  • Jet Deposition Technologies
  • Laser Sintering Technologies
  • Jet Molding Technologies
  • Electrical Discharge Machining
  • Micro milling / drilling
  • 3-D Micro Fabrication Technologies
  • Emerging Silicon Micro Fabrication Technologies
  • Deep Reactive Ion Etching
  • Electroplated Photo resist
  • Integration of Piezoelectric Devices

Advantages of MEMS

  • Ease of production.
  • MEMS can be mass-produced and are inexpensive to make.
  • Ease of parts alteration.
  • Higher reliability than their macro scale counterparts.

 Content of the Seminar and pdf report for MEMS

  • INTRODUCTION
  • WHAT ARE MEMS?
  • APPLICATION OF MEMS
  • COMPONENETS
  • MANUFACTURING PROCESS OF MEMS
  • SILICON MICROMACHINING
    BASIC TECHNIQUES
  • THIN FILMS
  • WET ETCHING
  • DRY ETCHING
  • EXCIMER LASER MICROMACHINING
  • FABRICATION PROCESS IN MEMS
  • WET ETCHING
  • DRY ETCHING
  • EXCIMER LASER MICROMACHINING
  • FABRICATION PROCESS IN MEMS
  • ADVANCED MICRO SYSTEM FABRICATION TECHNOLOGIES
  • PRECISION MACHINING TECHNOLOGIES
  • EMERING SILICON MICRO FABRICATION TECHNOLOGIES
  • ADVANTAGES
  • DISADVANTAGES
  • CONCLUSION
  • REFERENCES

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